RF System w/ Hüttinger PFG 600 and PFM 1500A + SVT Associates RF Plasma Source

RF System with Hüttinger PFG 600, PFM 1500A, and SVT Associates RF Plasma Source

This system was removed from a university laboratory where it was surplus to requirements.

It includes an RF power supply, matching network, and RF plasma source assembly, originally integrated into an SVT Associates thin-film or sputtering setup.

The RF Generator and Matching Network power on and are in fair cosmetic condition, showing some general surface wear. The plasma source and accessories are also in fair condition. We are unable to test them further at our facility.

The system comprises the following:

• Hüttinger PFG 600 RF Generator (P/N: 457638, S/N: 24036227-010-001)
• PFM 1500A Matching Network (P/N: 461490, S/N: 4700/003)
• SVT Associates RF Plasma Source and Accessories (no serial or part number located)
• All necessary interconnecting cables and wiring